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Title Materials and process characterization for VLSI, 1988 (ICMPC '88) : proceedings of the international conference : Oct. 24-29, 1988, Shanghai, China / editors, X.-F. Zong, Y.-Y. Wang, J. Chen
Imprint Singapore ; Teaneck, N.J. : World Scientific, c1988
 book jacket
LOCATION CALL # STATUS OPACMSG BARCODE
 Physics Library  TK7874 M425    AVAILABLE    30350000189509
Descript xix, 531 p. : ill., charts ; 23 cm
Note Includes bibliographies
Subject Integrated circuits -- Very large scale integration -- Congresses
Alt Author Zong, X.-F. (Xiangfu)
Wang, Y.-Y. (Yangyuan)
Chen, J. (Jun)
International Conference on Materials and Process Characterization for VLSI (1988 : Shanghai, China)
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