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Author Cox, David C. (David Christopher), 1965- author
Title Introduction to focused ion beam nanometrology / David C. Cox
Imprint San Rafael [California] (40 Oak Drive, San Rafael, CA, 94903, USA) : Morgan & Claypool Publishers, [2015]
Bristol [England] (Temple Circus, Temple Way, Bristol BS1 6HG, UK) : IOP Publishing, [2015]
book jacket
Descript 1 online resource (various pagings) : illustrations (some color)
text rdacontent
electronic isbdmedia
online resource rdacarrier
Series [IOP release 2]
IOP concise physics, 2053-2571
IOP (Series). Release 2
IOP concise physics
Note "Version: 20151001"--Title page verso
"A Morgan & Claypool publication as part of IOP Concise Physics"--Title page verso
Includes bibliographical references
Preface -- Acknowledgements -- Author biography -- 1. Metrology -- 1.1. What is metrology? -- 1.2. Metrology in the FIB
2. Focused ion beam -- 2.1. Introduction to the FIB instrument -- 2.2. Types of instrument -- 2.3. Gas injection systems -- 2.4. Patterning options -- 2.5. Other equipment and techniques found on FIB instruments
3. Ion-solid interactions -- 3.1. Overview -- 3.2. Imaging-secondary electrons and secondary ions -- 3.3. Ion milling-ion range, sputter yield and damage -- 3.4. Software to approximate ion range, damage and sputter yield
4. Focused ion beam-materials science applications -- 4.1. Overview -- 4.2. TEM foils and cross-sectioning -- 4.3. Three-dimensional reconstruction -- 4.4. Mechanical testing -- 4.5. Residual stress measurement and deformation -- 4.6. Secondary ion mass spectrometry and atom probe
5. Focused ion beam fabrication for metrology -- 5.1. Overview -- 5.2. Superconducting devices -- 5.3. Utilising manipulation systems -- 5.4. AFM cantilevers and dimensional artefacts for scanning probe techniques -- 5.5. Other devices
6. Future developments -- 6.1. Where we currently are -- 6.2. The end of the Ga ion source? -- 6.3. Final thoughts
This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology. Beginning with a description of the currently available instruments including the new addition to the field of plasma-based sources, it then gives an overview of ion solid interactions and how the different types of instrument can be applied. Chapters then describe how these machines can be applied to the field of materials science and device fabrication giving examples of recent and current activity in both these areas
This book will appeal in the first instance to university academics post-doctoral researchers and post- graduate students or advanced undergraduates. Beyond this, many industries where materials properties are required and in particular, where material is limited, for example anyone that processes thin films and coatings
Also available in print
Mode of access: World Wide Web
System requirements: Adobe Acrobat Reader
David C. Cox received his PhD from the Department of Metallurgy and Materials Science University of Cambridge, UK in 2001. He is currently a senior research fellow at the Advanced Technology Institute, University of Surrey, UK and has been seconded to the National Physical Laboratory, UK as a senior research scientist since 2005. Having a broad background in industry and academia covering many aspects of materials science, physics and electronic engineering, he has published close to 100 articles at the time of writing. Largely associated with both the Quantum Metrology and Materials groups at NPL, his most recent research work has concentrated on the area of using focused ion beam to fabricate devices for quantum metrology. Additionally, he has developed a strong interest in wider aspects of FIB fabrication and fundamental understanding of how focused ion beam can be used to study materials and the errors associated with aspects of the technique
Title from PDF title page (viewed on November 1, 2015)
Link Print version: 9781681740201
Subject Nanostructured materials -- Measurement
Engineering Measurement and calibration. bicssc
TECHNOLOGY & ENGINEERING / Measurement. bisacsh
Alt Author Morgan & Claypool Publishers, publisher
Institute of Physics (Great Britain), publisher
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