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作者 Chen, Lichuan
書名 Polymer jetting roller nanoprint process and system
國際標準書號 9781124914343
book jacket
說明 69 p
附註 Source: Masters Abstracts International, Volume: 50-02, page: 1252
Adviser: Wenchuang (Walter) Hu
Thesis (M.S.)--The University of Texas at Dallas, 2011
Nanoimprint lithography (NIL) is an emerging nanofabrication technology with high resolution, high throughput, and low cost developed in the last decade. Despite extensive studies of this technique in academic research by many people, the throughput is still lacking for real nano-manufacturing. There are growing interests in developing scaleup strategies of NIL for higher throughput and lower cost process, such as roll-to-roll process. With this in mind, we started from a basic design of rollable NIL, and have successfully developed a roll-to-roll prototype machine using polymer jetting process for precision deposition of polymer materials, which is a major difference compared to previous similar equipments by other group. This thesis demonstrates the machine design and development process and some understandings from testing results with this machine for making microscale and nanoscale polymer structures
School code: 0382
Host Item Masters Abstracts International 50-02
主題 Engineering, Mechanical
0548
Alt Author The University of Texas at Dallas. Mechanical Engineering
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