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Author Jaeger, Richard C.
Title Introduction to microelectronic fabrication / Richard C. Jaeger
Imprint Reading, Mass. : Addison-Wesley Pub. Co., c1988
book jacket
LOCATION CALL # STATUS OPACMSG BARCODE
 Physics Library  TK7874 J22    MISSING    30350000303787
Descript xiii, 232 p. : ill. ; 24 cm
Series Modular series on solid state devices ; v. 5
Note Includes bibliographical references and index
Subject Integrated circuits -- Very large scale integration -- Design and construction -- Congresses
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