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Author Khursheed, Anjam
Title Scanning Electron Microscope Optics And Spectrometers
Imprint Singapore : World Scientific Publishing Company, 2010
©2011
book jacket
Descript 1 online resource (400 pages)
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
Note Intro -- Contents -- Dedication -- Preface -- Chapter 1 Conventional SEM Design -- 1.1 Introduction to the SEM -- 1.2 Basic principles of electron optics -- 1.3 The electron gun -- 1.4 Lens aberrations and primary beam probe size -- 1.5 Deflection systems -- 1.6 Quadrupole stigmators -- 1.7 SEM output signals -- 1.8 The emission hemisphere and BSE collection -- 1.9 The scattered electron energy distribution -- 1.10 The SE collection efficiency -- 1.11 Specimen charging -- 1.12 Elastic BSE imaging -- 1.13 Selected SEM image examples -- Chapter 2 Spectrometer Design Principles -- 2.1 Figures of merit -- 2.2 The SAM and the SEM -- 2.3 The retarding field analyzer -- 2.4 Deflection field analyzers -- 2.4.1 The parallel plate analyzer -- 2.4.2 The cylindrical mirror analyzer -- 2.4.3 Electric sector analyzers -- 2.4.4 Magnetic deflector analyzers -- 2.4.5 Wien filters -- 2.4.6 Magnetic collimation and time of flight spectrometers -- Chapter 3 In-lens Improvements -- 3.1 Magnetic immersion lenses -- 3.2 Magnetic semi-in-lens designs -- 3.3 Electric retarding field lenses -- 3.4 Mixed field in-lens designs -- 3.5 Selected in-lens image examples -- Chapter 4 Sub-nanometer Probe Diameters -- 4.1 Monochromators and immersion objective lenses -- 4.2 Aberration correctors -- 4.3 The helium ion microscope -- Chapter 5 Secondary Electron Spectrometers -- 5.1 Early deflection analyzers -- 5.2 Retarding field analyzers -- 5.3 Surface fields and signal-to-noise characteristics -- 5.4 Deflection/multi-channel analyzers -- Chapter 6 Full Range Deflector Spectrometer Designs -- 6.1 First-order focusing toroidal analyzers -- 6.2 A Second-order focusing toroidal analyzer design -- 6.3 A modified Fountain Analyzer design -- Chapter 7 Full Range Parallel Energy Spectrometer Designs -- 7.1 The time-of-flight spectrometer -- 7.2 A Gaussian field magnetic sector
7.3 A round magnetic beam separator -- Chapter 8 Spectroscopic SEM proposals -- Appendix 1.0 Field Expansions -- Appendix 1.1 Derivation of the Paraxial Equation -- Appendix 1.2 Spherical Aberration -- Appendix 1.3 Chromatic Aberration -- Appendix 2 Multipole Lenses -- Bibliography -- Index
Key Features:This book will fill a gap for those looking to redesign the SEM to incorporate spectrometers
Description based on publisher supplied metadata and other sources
Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2020. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries
Link Print version: Khursheed, Anjam Scanning Electron Microscope Optics And Spectrometers Singapore : World Scientific Publishing Company,c2010 9789812836670
Subject Scanning electron microscopes.;Optical spectrometers
Electronic books
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