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Author Gonzalez-elipe, Agustin
Title Low Energy Ion Assisted Film Growth
Imprint Singapore : World Scientific Publishing Company, 2003
©2003
book jacket
Descript 1 online resource (299 pages)
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
Note Intro -- Contents -- Foreword -- CHAPTER 1: BASIC CONCEPTS ON THE INTERACTION OF LOW ENERGY ION BEAMS WITH SOLID TARGETS -- 1.1. Introduction -- 1.2. Interatomic interaction -- 1.3. Basic concepts in classical dynamics of binary elastic collisions -- 1.4. Range of energetic ions in solids -- 1.5. Spatial distribution of deposited energy -- 1.6. Damage induced by ion bombardment -- 1.7. Sputtering -- 1.8. Experimental parameters in IAD thin film growth -- References -- CHAPTER 2: ION ASSISTED METHODS OF PREPARATION OF THIN FILMS -- 2.1. Assistance of film growth with independent ion sources -- 2.2. Ion assisted deposition of thin films without independent ion sources -- 2.3. Plasma immersion ion implantation -- 2.4. Broad beam ion sources -- References -- CHAPTER 3: EFFECTS INDUCED BY THE ION ASSISTANCE OF FILM GROWTH -- 3.1. Ion beam effects during film growth -- 3.2. Nucleation and growth of thin films under ion bombardment -- 3.3. Topography and surface and interface roughness -- 3.4. Interface mixing -- 3.5. Densification of thin films -- 3.6. Defect generation -- 3.7. Amorphisation crystallinity and phase transformations -- 3.8. Compound formation by IAD -- 3.9. Texture development -- 3.10. Influence of ion assistance on thin film stress -- 3.11. Improvement of adhesion in IAD thin films -- References -- CHAPTER 4: APPLICATIONS OF IAD PROCESSING -- 4.1. Tribological coatings -- 4.2. Corrosion resistant coatings -- 4.3. Modification of biomaterials -- 4.4. Metallisation of polymers -- 4.5. Optical coatings -- 4.6. Magnetic thin films -- References -- CHAPTER 5: DIAMOND-LIKE CARBON AND CUBIC-BORON NITRIDE FILMS -- 5.1. Diamond-like carbon -- 5.2. Characterization methods and related properties -- 5.3. DLC deposition methods -- 5.4. Influence of the deposition parameters on the sp3 bonding fraction and related properties
5.5. Stress in DLC films -- 5.6. Properties and applications of the DLC films -- 5.7. Cubic Boron nitride films -- 5.8. Characterization of c-BN -- 5.9. c-BN deposition methods -- 5.10. Influence of the deposition parameters -- 5.11. Stress -- 5.12. Properties and applications of c-BN films -- 5.13. Modelling the growth of sp3 bonded materials (ta-C, ta-C:H and c-BN) -- 5.14. Related materials (CNx, B-C-N) -- References -- Acronyms List -- Subject Index
This book is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low energy ion beams with materials. The main procedures used for IAD synthesis of thin films and the main effects of ion beam bombardment on growing films, such as densification, stress, mixing, surface flattening and changes in texture are critically discussed. A description of some of the applications of IAD methods and a review of the synthesis by IAD of diamond-like carbon and cubic-boron nitride complete the book. Contents: Basic Concepts on the Interaction of Low Energy Ion Beams with Solid Targets; Ion Assisted Methods of Preparation of Thin Films; Effects Induced by the Ion Assistance of Film Growth; Applications of IAD Processing; Diamond-Like Carbon and Cubic-Boron Nitride Films. Readership: Researchers, post-graduate students and engineers with limited experience in the techniques of thin film deposition
Description based on publisher supplied metadata and other sources
Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2020. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries
Link Print version: Gonzalez-elipe, Agustin Low Energy Ion Assisted Film Growth Singapore : World Scientific Publishing Company,c2003 9781860943515
Subject Thin films -- Design and construction.;Thin films -- Effect of radiation on.;Ion bombardment
Electronic books
Alt Author Sanz, Jose M
Yubero, Francisco
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