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Author Prasad, A
Title NEMS/MEMS Technology and Devices : Nems/Mems Technology and Devices
Imprint Durnten : Trans Tech Publications, Limited, 2011
book jacket
Edition 1st ed
Descript 1 online resource (233 pages)
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
Series Advanced Materials Research ; v.254
Advanced Materials Research
Note Intro -- NEMS/MEMS Technology and Devices, ICMAT2011 -- Preface -- Table of Contents -- Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors -- Thick-Film Deposition of High-Viscous Liquid Photopolymer -- Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application -- Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever -- Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure -- Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force -- A Static Micromixer Inspired from Fractal-Like Natural Flow Systems -- AlN Actuator for Tunable RFMEMS Capacitor -- GEMS: A MEMS-Based Way for the Innervation of Materials -- On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems -- Design Consideration of Membrane Structure for Thermal Actuated Micropump -- Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator -- Fabrication of a Peltier Device Based on InSb and SbTe Thin Films -- Gapfill Study of Polyimides for MEMS Applications -- A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film Transistor -- Wireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications -- Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator -- FBAR Resonators with Sufficient High Q for RF Filter Implementation -- Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators -- Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis -- Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement -- Focused Ion Beam Fabricated Polystyrene-Platinum Thermal Microactuator -- Lead-Free BSZT/Epoxy 1-3 Composites for Ultrasonic Transducer Applications
Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants -- Tagging for Capsule Endoscopy Localization -- The Negative π/2 Phase Shift of Total Reflect Light -- High Topography Polyimide CMP Process -- Hydridosilane Modification of Metals: An Exploratory Study -- Multi Degree-of-Freedom Micromotor Utilizing an Electrothermal Actuator Array and a Spherical Rotor -- Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid Film -- A New Peltier Device with a Coaxial Thermocouple -- A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device -- Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography -- Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches -- Double-Step Plasma Etching for SiO2 Microcantilever Release -- Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators -- Development of Multiple-Step SOI DRIE Process for Superior Notch Reduction at Buried Oxide -- Oscillating Micromixers on a Compact Disc -- Robust Sequential Flow Controls on the Centrifugal Platform -- Fabrication of Micro-Cantilevers Using RF Magnetron Sputtered Silicon Carbide Films -- Effect of Temperature on the Electrical and Gas Sensing Properties of Polyaniline and Multiwall Carbon Nanotube Doped Polyaniline Composite Thin Films -- Fabrication of MEMS Based Microspeaker Using Bulk Micromachining Technique -- Simulation Study of Side-by-Side Spiral Coil Design for Micromagnetometer -- Fabrication and Performance Characterization of a Disposable Micropump Actuated by Piezoelectric-Disc -- Proposal and Fabrication of a Temperature-Field Stage with an NN-Type Peltier Device -- Effect of Substrate Temperature on Properties of Silicon Nitride Films Deposited by RF Magnetron Sputtering
On-Chip Trapping and Characterization of Cryptosporidium Using Surface Coated ITO-PDMS Bonded Chips -- A Novel Micromechanical Resonator Using Two-Dimensional Phononic Crystal Slab -- A New Robust Four Degree-of-Freedom Gyroscope Design -- Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes -- Investigation of Rhabdomyosarcoma Cell Electrofusion -- Investigation of Simple Process Technology for the Fabrication of Valveless Micropumps -- Micro-Bubble Generation Using Continuous-Wave Laser -- Photocatalytic Microreactor Using Monochromatic Visible Light -- Keywords Index -- Authors Index
The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic.Review from Book News Inc.: Papers from a summer 2011 symposium shed light on new devices, process innovations, and engineering applications related to nanoelectromechanical systems (NEMS), microelectromechanical systems (MEMS), and micro total analysis systems. Major themes are theory, design, and analysis of NEMS/MEMS; NEMS/MEMS fabrication technologies; sensors, actuators and microsystems; RF MEMS devices and characterization; microfluidics and micro total analysis systems; nanotechnology and nano devices; and optical MEMS, nanophotonics, and plasmonics. Some specific topics include thick-film deposition of high-viscous liquid photopolymer, separation gap estimation in dynamic systems, and a static micromixer inspired by fractal-like natural flow systems. Other subjects include a novel approach to MEMS based on biological sensory systems, design considerations of membrane structure for a thermal actuated micropump, fabrication of a Peltier device based on InSb and SbTe thin films, and a method for quantification of meta-amyloid using a photo-sensitive thin film transistor. B&w photos and images are included
Description based on publisher supplied metadata and other sources
Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2020. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries
Link Print version: Prasad, A. NEMS/MEMS Technology and Devices : Nems/Mems Technology and Devices Durnten : Trans Tech Publications, Limited,c2011 9783037851456
Subject Nanoelectromechanical systems -- Congresses.;Microelectromechanical systems -- Congresses
Electronic books
Alt Author Tsai, Julius M
Grandfield, J.F
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