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Title Reduced thermal processing for ULSI / edited by Roland A. Levy
Imprint New York : Plenum Press, c1989
book jacket
LOCATION CALL # STATUS OPACMSG BARCODE
 Physics Library  TK7871 R312    AVAILABLE    30350000199607
Descript xi, 438 p. : ill. ; 26 cm
Series NATO ASI series. Series B, Physics ; vol. 207
NATO ASI series. Series B, Physics ; v. 207
Note "Published in cooperation with NATO Scientific Affairs Division."
"Proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI, held June 20-July 1, 1988, in Boca Raton, Florida"--T.p. verso
Includes bibliographical references
Subject Integrated circuits -- Very large scale integration -- Heat treatment -- Congresses
Alt Author Levy, Roland A. (Roland Albert), 1944-
NATO Advanced Study Institute on Reduced Thermal Processing for ULSI (1988 : Boca Raton, Fla.)
North Atlantic Treaty Organization. Scientific Affairs Division
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