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作者 Asundi, Anand
書名 Digital Holography for MEMS and Microsystem Metrology
出版項 Hoboken : John Wiley & Sons, Incorporated, 2011
©2011
國際標準書號 9781119997306 (electronic bk.)
9780470978696
book jacket
版本 1st ed
說明 1 online resource (229 pages)
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
系列 Microsystem and Nanotechnology Series (ME20) Ser. ; v.7
Microsystem and Nanotechnology Series (ME20) Ser
附註 Digital Holography for MEMS and Microsystem Metrology -- Contents -- About the Editor -- Contributors -- Series Preface -- Acknowledgements -- Abbreviations -- 1 Introduction -- 2 Digital Reflection Holography and Applications -- 2.1 Introduction to Digital Holography and Methods -- 2.1.1 Holography and Digital Holography -- 2.1.2 Digital Recording Mechanism -- 2.1.3 Numerical Reconstruction Methods -- 2.2 Reflection Digital Holographic Microscope (DHM) Systems Development -- 2.2.1 Optical Systems and Methodology -- 2.3 3D Imaging, Static and Dynamic Measurements -- 2.3.1 Numerical Phase and 3D Measurements -- 2.3.2 Digital Holographic Interferometry -- 2.4 MEMS/Microsystems Characterization Applications -- 2.4.1 3D Measurements -- 2.4.2 Static Measurements and Dynamic Interferometric Measurement -- 2.4.3 Vibration Analysis -- References -- 3 Digital Transmission Holography and Applications -- 3.1 Historical Introduction -- 3.2 The Foundation of Digital Holography [30] -- 3.2.1 Theoretical Analysis of Wavefront Interference -- 3.2.2 Digital Hologram Recording and Reconstruction -- 3.2.3 Different Numerical Reconstruction Algorithms -- 3.3 Digital Holographic Microscopy System -- 3.3.1 Digital Holographic Microscopy with Physical Spherical Phase Compensation -- 3.3.2 Lens-Less Common-Path Digital Holographic Microscope -- 3.3.3 Common-Path Digital Holographic Microscope -- 3.3.4 Digital Holographic Microscopy with Quasi-Physical Spherical Phase Compensation : Light with Long Coherence Length -- 3.3.5 Digital Holographic Microscopy with Quasi-Physical Spherical Phase Compensation : Light with Short Coherence Length -- 3.4 Conclusion -- References -- 4 Digital In-Line Holography and Applications -- 4.1 Background -- 4.2 Digital In-Line Holography -- 4.2.1 Recording and Reconstruction -- 4.3 Methodology for 2D Measurement of Micro-Particles
4.3.1 Numerical Reconstruction, Pre-Processing and Background Correction -- 4.3.2 Image Segmentation -- 4.3.3 Particle Focusing -- 4.3.4 Particle Size Measurement -- 4.4 Validation and Performance of the 2D Measurement Method -- 4.4.1 Verification of the Focusing Algorithm -- 4.4.2 Spherical Beads on a Glass Slide -- 4.4.3 Microspheres in a Flowing System Normalized Population -- 4.4.4 10 μm Microspheres Suspension -- 4.4.5 Measurement of Microfibers -- 4.5 Methodology for 3D Measurement of Micro-Fibers -- 4.5.1 Method 1: The 3D Point Cloud Method -- 4.5.2 Method 2: The Superimposition Method -- 4.6 Validation and Performance of the 3D Measurement Methods -- 4.6.1 Experiment with a Single Fiber -- 4.6.2 3D Measurements of Micro-Fibers in Suspension -- 4.7 Conclusion -- References -- 5 Other Applications -- 5.1 Recording Plane Division Multiplexing (RDM) in Digital Holography for Resolution Enhancement -- 5.1.1 Introduction of the Recording Plane Division Multiplexing Technique -- 5.1.1.1 The SM Technique -- 5.1.1.2 The ADM Technique -- 5.1.1.3 The WDM Technique -- 5.1.1.4 The PM Technique -- 5.1.2 RDM Implemented in Pulsed Digital Holography for Ultra-Fast Recording -- 5.1.2.1 Introduction -- 5.1.2.2 AMD in the Pulsed Digital Holography -- 5.1.2.3 WDM in Pulsed Digital Holography -- 5.1.3 RDM Implemented by Digital Holography for Spatial Resolution Enhancement -- 5.1.3.1 Introduction -- 5.1.3.2 AMD in Digital Holography -- 5.1.3.3 AMD and PM in Digital Holography -- 5.1.4 Conclusion -- References -- 5.2 Development of Digital Holographic Tomography -- 5.2.1 Introduction -- 5.2.2 Classification of Digital Holographic Tomography -- 5.2.3 Principle of Digital Holographic Tomography -- 5.2.3.1 Principle of Digital Holography -- 5.2.3.2 Reconstruction Principle of Computer Tomography -- 5.2.3.3 CT Reconstruction Algorithms -- 5.2.4 Application of DHT
5.2.4.1 Detection of Biological Tissue -- 5.2.4.2 Material Detection -- References -- 5.3 Digital Holographic Interferometry for Phase Distribution Measurement -- 5.3.1 Measurement Principle of Digital Holographic Interferometry -- 5.3.1.1 Principle of Phase Measurement of the Object Wave Field -- 5.3.1.2 Principle of Digital Holographic Interferometry -- 5.3.2 Applications of Digital Holographic Interferometry in Surface Profile Testing of MEMS/MOEMS -- 5.3.3 Applications of Digital Holographic Interferometry in Measuring Refractive Index Distribution -- 5.3.3.1 Measurement of Light-Induced Index Change in Photorefractive Crystals -- 5.3.3.2 Measurement of Acoustic Standing Wave Field -- 5.3.3.3 Measurement of Plasma Plume Field -- 5.3.3.4 Measurement of Temperature Distribution in Air Field -- 5.3.3.5 Visualization Measurement of Turbulent Flow Field in Water -- References -- 6 Conclusion -- Index
Anand Asundi, Nanyang Technological University, Singapore Anand Asundi is Professor and Deputy Director of the Advanced Materials Research Centre at Nanyang Technological University in Singapore. His research interests are in photomechanics and optical sensors & he has published over 200 papers in peer-reviewed journals and presented invited and plenary talks at international conferences. He has also chaired and organized numerous conferences in Singapore and other parts of the world. He is Editor of Optics and Lasers in Engineering and on the Board of Directors of SPIE, and a fellow of the Institute of Engineers, Singapore and SPIE. He also holds advisory professorial appointments at Tongji University, Shanghai University and Harbin Institute of Technology, China. He is Chairman of the Asian Committee on Experimental Mechanics and the Asia Pacific Committee on Smart and Nano Materials both of which he co-founded
Description based on publisher supplied metadata and other sources
Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2020. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries
鏈接 Print version: Asundi, Anand Digital Holography for MEMS and Microsystem Metrology Hoboken : John Wiley & Sons, Incorporated,c2011 9780470978696
主題 Microelectromechanical systems -- Measurement.;Microelectronics -- Measurement.;Holographic testing.;Image processing -- Digital techniques
Electronic books
Alt Author ?ayirci, Erdal
Eayirci, Erdal
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