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作者 Hori, Takashi, 1956-
書名 Gate dielectrics and MOS ULSIs : principles, technologies, and applications / Takashi Hori
出版項 Berlin ; New York : Springer, c1997
國際標準書號 3540631828 (Berlin : acid-free paper)
book jacket
說明 xiv, 352 p. : ill. ; 24 cm
系列 Springer series in electronics and photonics, 0172-5734 ; v. 34
附註 Includes bibliographical references (p. 325-341) and index
主題 Integrated circuits -- Ultra large scale integration
Dielectric devices
Metal oxide semiconductors
Silicon-on-insulator technology
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