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作者 Nonogaki, Saburo, 1930-
書名 Microlithography fundamentals in semiconductor devices and fabrication technology / Saburo Nonogaki, Takumi Ueno, Toshio Ito
出版項 New York : Marcel Dekker, c1998
國際標準書號 0824799518
book jacket
館藏地 索書號 處理狀態 OPAC 訊息 條碼
 物理所圖書室  TK7871.85 N812    在架上    30350000340664
說明 327 p. : ill. ; 24 cm
附註 Includes bibliographical references and index
主題 Semiconductors -- Design and construction
Microlithography -- Industrial applications
Manufacturing processes
Photoresists
Alt Author Ueno, Takumi, 1951-
Ito, Toshio, 1952-
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