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書名 Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A. / editors, Gregg S. Higashi ... [et al.]
出版項 Pittsburgh, Pa. : Materials Research Society, c1997
國際標準書號 1558993819
book jacket
館藏地 索書號 處理狀態 OPAC 訊息 條碼
 物理所圖書室  TK7871.85 S416    在架上    30350000321763
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